Chemical dissolution of gallium antimonide in HNO3-HCl-CH3COOH solutions

O. S. Chernyuk; V. N. Tomashik; V. I. Grytsiv; Z. F. Tomashik; V. M. Kashpor

doi:10.1117/12.502294

14 April 2003 Chemical dissolution of gallium antimonide in the HNO₃-HCl-CH₃COOH solutions

O. S. Chernyuk, V. N. Tomashik, V. I. Grytsiv, Z. F. Tomashik, V. M. Kashpor

Proceedings Volume 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (2003) https://doi.org/10.1117/12.502294
Event: Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, 2002, Kiev, Ukraine

Abstract

The nature of GaSb dissolution in the mixtures of HNO₃-HCl-CH₃COOH system in reproducible hydrodynamics conditions has been investigated. The main regularities of chemical etching and polishing of GaSb, Sb and Ga were determined and surfaces of equal etching rates (Gibbs diagrams) were built. The potentials of self-dissolutions of indicated materials in the investigated solutions were studied also. Region of polishing solutions was defined and etchant compositions for chemical dynamic polishing of GaSb were optimized.

Citation Download Citation

O. S. Chernyuk, V. N. Tomashik, V. I. Grytsiv, Z. F. Tomashik, and V. M. Kashpor "Chemical dissolution of gallium antimonide in the HNO₃-HCl-CH₃COOH solutions", Proc. SPIE 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (14 April 2003); https://doi.org/10.1117/12.502294

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available