LTCC package for MEMS device

Leszek J. Golonka; Andrzej Dziedzic; Jan Dziuban; Jaroslaw Kita; Tomasz Zawada

doi:10.1117/12.517066

22 September 2003 LTCC package for MEMS device

Leszek J. Golonka, Andrzej Dziedzic, Jan Dziuban, Jaroslaw Kita, Tomasz Zawada

Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517066
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland

Abstract

LTCC package of silicon membrane katharometer was made and investigated. The package protects the katharometer against mechanical damage and makes possible an easy connection of electrical signals. Moreover, the heater and temperature sensors allow for obtaining the proper temperature of the element. The basic electrical parameters of the integrated heater and thermistors as well as measured temperature distribution are presented.

Citation Download Citation

Leszek J. Golonka, Andrzej Dziedzic, Jan Dziuban, Jaroslaw Kita, and Tomasz Zawada "LTCC package for MEMS device", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); https://doi.org/10.1117/12.517066

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