Micromachining technology in optoelectronic sensing technologies

Christophe Gorecki

doi:10.1117/12.517046

22 September 2003 Micromachining technology in optoelectronic sensing technologies

Christophe Gorecki

Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517046
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland

Abstract

This paper examines the contribution of MEMS/MOEMS technology in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis to sensors with micromachined integrated optic structures, nano-scale SNOM sensors, and fiber-to-waveguide coupling systems.

Citation Download Citation

Christophe Gorecki "Micromachining technology in optoelectronic sensing technologies", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); https://doi.org/10.1117/12.517046

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