Standing-wave interferometer based on partially transparent photodiodes

Hans J. Buchner; Eerke Bunte; Viktor Mandryka; Helmut Stiebig; Gerd Jaeger

doi:10.1117/12.499902

30 May 2003 Standing-wave interferometer based on partially transparent photodiodes

Hans J. Buchner, Eerke Bunte, Viktor Mandryka, Helmut Stiebig, Gerd Jaeger

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.499902
Event: Optical Metrology, 2003, Munich, Germany

Abstract

A novel interferometer concept will be presented which is based on an optical standing wave. This standing wave is scanned by a novel, partially transparent photodetector, which is designed as nip-photodiode and contacted with transparent conductive oxide (TCO). Two transparent photodiodes are integrated to a transparent phase-sensitive sensor. The photodiodes are longitudinally arranged on the optical axis of the standing wave and generate a sine and a cosine signal for the up- and down-counting of the intensity maxima and minima of the standing wave. The layer thickness of the transparent photodiodes has been designed so as to take appropriate coating into account. These measures are demonstrated by a number of experimental results. An incorrect phase relation between the photodiodes will be corrected using the Heydemann algorithm. The non-linearity of the interferometer at a length of <λ/2 will be discussed.

Citation Download Citation

Hans J. Buchner, Eerke Bunte, Viktor Mandryka, Helmut Stiebig, and Gerd Jaeger "Standing-wave interferometer based on partially transparent photodiodes", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.499902

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