Lateral shearing interferometer using phase-shifting technique without moving element

Jae Bong Song; Yoon Woo Lee; In Won Lee; Jung Hoon Lee

doi:10.1117/12.505396

22 December 2003 Lateral shearing interferometer using phase-shifting technique without moving element

Jae Bong Song, Yoon Woo Lee, In Won Lee, Jung Hoon Lee

Proceedings Volume 5180, Optical Manufacturing and Testing V; (2003) https://doi.org/10.1117/12.505396
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

A simple phase shifting (PS) technique without moving element in lateral shearing (LS) interferometer is presented. This method uses Murty’s simple LS interferometer with a wedge plate and adds only two identical transmission gratings. The two gratings can make three (or odd number of) equally separated identical test wavefronts. The wedge plate changes the optical path difference between the original wavefront and the sheared wavefront along the wedge direction. So three (or odd number of) interferograms having different phase shift quantity can be obtained simultaneously and 3-step PS interferometry algorithm can be applied.

Citation Download Citation

Jae Bong Song, Yoon Woo Lee, In Won Lee, and Jung Hoon Lee "Lateral shearing interferometer using phase-shifting technique without moving element", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.505396

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available