Study on lateral dual-element electron tunneling accelerometer

Yuhe Li; Qingxiang Li; Zhifeng Long; Yanyang Zi; Dapeng Zhao; Yangkuan Guo

doi:10.1117/12.521359

2 September 2003 Study on lateral dual-element electron tunneling accelerometer

Yuhe Li, Qingxiang Li, Zhifeng Long, Yanyang Zi, Dapeng Zhao, Yangkuan Guo

Proceedings Volume 5253, Fifth International Symposium on Instrumentation and Control Technology; (2003) https://doi.org/10.1117/12.521359
Event: Fifth International Symposium on Instrumentation and Control Technology, 2003, Beijing, China

Abstract

Electron tunneling accelerometer has the advantages of high precision, small volume, low consumption and so on. This paper introduces the design on a lateral dual-element Electron Tunneling Accelerometer. The model, structure design, parameters test and fabrication process are provided in detail. The results of analysis and simulation show that the working frequency of sensor could be up to 2 kHz.

Citation Download Citation

Yuhe Li, Qingxiang Li, Zhifeng Long, Yanyang Zi, Dapeng Zhao, and Yangkuan Guo "Study on lateral dual-element electron tunneling accelerometer", Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); https://doi.org/10.1117/12.521359

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available