Micro-assembly cell with dual optical/computer vision control for electrostatic gripping of MEMS

Eniko T. Enikov; Scott Clark; Lyubomir Minkov

doi:10.1117/12.512641

30 September 2003 Micro-assembly cell with dual optical/computer vision control for electrostatic gripping of MEMS

Eniko T. Enikov, Scott Clark, Lyubomir Minkov

Proceedings Volume 5267, Intelligent Robots and Computer Vision XXI: Algorithms, Techniques, and Active Vision; (2003) https://doi.org/10.1117/12.512641
Event: Photonics Technologies for Robotics, Automation, and Manufacturing, 2003, Providence, RI, United States

Abstract

This paper describes the development of a miniature assembly cell for microsystems. The cell utilizes a transparent electrostatic gripper allowing the use of computer vision for part alignment with respect to the gripper. Part to assembly alignment is achieved via optical triangulation using a fiber-coupled laser and a position sensitive detector (PSD). The system layout, principle of operation and design are described along with the visual and optical control algorithms and their implementation. Experimental measurements of the performance of the stage indicate normal and tangential gripping forces in the range of 0.03-2.5 mN and 1.-9. mN respectively. The visual search algorithm limits the feature tracking speed to 111ms /search. The alignment accuracy of the visual and optical proportional position feedback controls were determined to be ±7 μm and ±10 μm respectively.

Citation Download Citation

Eniko T. Enikov, Scott Clark, and Lyubomir Minkov "Micro-assembly cell with dual optical/computer vision control for electrostatic gripping of MEMS", Proc. SPIE 5267, Intelligent Robots and Computer Vision XXI: Algorithms, Techniques, and Active Vision, (30 September 2003); https://doi.org/10.1117/12.512641

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