3D patterning method in femtosecond laser microprocessing using diffractive optical elements

Yutaka Kuroiwa; Nobuhito Takeshima; Yoshihiro Narita; Shuhei Tanaka; Kazuyuki Hirao

doi:10.1117/12.524086

15 July 2004 3D patterning method in femtosecond laser microprocessing using diffractive optical elements

Yutaka Kuroiwa, Nobuhito Takeshima, Yoshihiro Narita, Shuhei Tanaka, Kazuyuki Hirao

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.524086
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

We demonstrated a simple chromatic dispersion reduction method of 3-dimensional (3D) patterning of femtosecond pulses using a multi-level phase type diffractive optical element (DOE) and a focusing objective lens. Our method increases flexibility of femtosecond laser microprocessing. With appropriate focal length of the DOE and distance between the DOE and the focusing lens, large chromatic dispersion of the DOE resulting from spectral bandwidth of a femtosecond pulse can be reduced, and 3D focusing pattern of femtosecond pulse can be obtained not only controlled in focal plane but also in focal depth. The method was verified through optical and processing experiments with laser pulses of 400 fs duration and of 40 nm bandwidth. The focal length of the DOE and the objective lens was 1600 mm and 10 mm, respectively. Partially periodical structure of focusing points was formed at designed position and its focal depth were much smaller than that focused with only the DOE. By irradiating the constructed beam, microstructure was formed precisely inside SiO₂ glass. The processed points are clearly separated each other with a separation of 5 mm and the spot sizes were almost same as those irradiated without the DOE.

Citation Download Citation

Yutaka Kuroiwa, Nobuhito Takeshima, Yoshihiro Narita, Shuhei Tanaka, and Kazuyuki Hirao "3D patterning method in femtosecond laser microprocessing using diffractive optical elements", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.524086

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