Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Yasufumi Enami; Alex K.-Y. Jen; Gerald Meredith; Nasser Peyghambarian

doi:10.1117/12.527613

18 June 2004 Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Yasufumi Enami, Alex K.-Y. Jen, Gerald Meredith, Nasser Peyghambarian

Author Affiliations +

Proceedings Volume 5351, Organic Photonic Materials and Devices VI; (2004) https://doi.org/10.1117/12.527613
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V_π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V_πby the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V_πof 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V_πfurther.

Citation Download Citation

Yasufumi Enami, Alex K.-Y. Jen, Gerald Meredith, and Nasser Peyghambarian "Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides", Proc. SPIE 5351, Organic Photonic Materials and Devices VI, (18 June 2004); https://doi.org/10.1117/12.527613

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