Approximation of electron beam energy loss in homogeneous semiconducting materials

M. A. Stepovich; A. G. Khokhlov; A. A. Samokhvalov; M. M. Tchaikovsky

doi:10.1117/12.552158

1 March 2004 Approximation of electron beam energy loss in homogeneous semiconducting materials

M. A. Stepovich, A. G. Khokhlov, A. A. Samokhvalov, M. M. Tchaikovsky

Proceedings Volume 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2004) https://doi.org/10.1117/12.552158
Event: Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2003, Moscow, Russian Federation

Abstract

It's shown that modified Laguerre's functions can be used for approximation of electron beam energy loss distribution in semiconductors under the consideration of modificating parameter appropriate choice.

Citation Download Citation

M. A. Stepovich, A. G. Khokhlov, A. A. Samokhvalov, and M. M. Tchaikovsky "Approximation of electron beam energy loss in homogeneous semiconducting materials", Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); https://doi.org/10.1117/12.552158

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