Novel 2-chip-concept for micromechanically tunable long-wavelength VCSELs for the 1.55 µm wavelength range

Markus Maute; Frank Riemenschneider; Markus Ortsiefer; Robert Shau; Peter Meissner; Markus-Christian Amann

doi:10.1117/12.544848

8 September 2004 Novel 2-chip-concept for micromechanically tunable long-wavelength VCSELs for the 1.55 μm wavelength range

Markus Maute, Frank Riemenschneider, Markus Ortsiefer, Robert Shau, Peter Meissner, Markus-Christian Amann

Author Affiliations +

Proceedings Volume 5453, Micro-Optics, VCSELs, and Photonic Interconnects; (2004) https://doi.org/10.1117/12.544848
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

In this paper, a novel two-chip-concept for an electrically pumped and micro-mechanically tunable vertical-cavity surface-emitting laser (VCSEL) operating in the 1.55 μm wavelength range is presented. One chip contains the active region with 5 quantum wells based on the material system AlGaInAs/InP and a buried tunnel junction (BTJ) to provide current confinement and waveguiding. A dielectric mirror forms the back reflector. The second chip consists of a curved mirror membrane that can be displaced by electro-thermal heating. The main advantage of this approach is that both parts can be optimized separately. Packaged laser devices show continuous-wave operation at room temperature with an output power of up to 200 μW and very good side mode suppression in the order of 45 dB. Single-mode operation was observed across a tuning range of more than 30 nm.

Citation Download Citation

Markus Maute, Frank Riemenschneider, Markus Ortsiefer, Robert Shau, Peter Meissner, and Markus-Christian Amann "Novel 2-chip-concept for micromechanically tunable long-wavelength VCSELs for the 1.55 μm wavelength range", Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); https://doi.org/10.1117/12.544848

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available