Paper
15 July 2004 E-beam-induced absorption in various grades of quartz
Paul B. Sergeev, Ivan I. Cheremisin, T. A. Ermolenko, I. K. Evlampiev, S. A. Popov, M. S. Pronina, P. K. Turoverov, A. P. Sergeev, Vladimir D. Zvorykin
Author Affiliations +
Proceedings Volume 5506, Nonresonant Laser-Matter Interaction (NLMI-11); (2004) https://doi.org/10.1117/12.580227
Event: Nonresonant Laser-Matter Interaction (NLMI-11), 2003, St. Petersburg, Russian Federation
Abstract
The comprehensive results are presented on the behaviour of high purity synthetic quartz glasses under the action of intensive ionizing radiation (x-rays and energetic electrons) and UV laser radiation with 248-nm wavelength. They are concerned to the application of e-beam-pumped large-size KrF-laser as a driver for the Inertial Fusion Energy.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul B. Sergeev, Ivan I. Cheremisin, T. A. Ermolenko, I. K. Evlampiev, S. A. Popov, M. S. Pronina, P. K. Turoverov, A. P. Sergeev, and Vladimir D. Zvorykin "E-beam-induced absorption in various grades of quartz", Proc. SPIE 5506, Nonresonant Laser-Matter Interaction (NLMI-11), (15 July 2004); https://doi.org/10.1117/12.580227
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KEYWORDS
Quartz

Glasses

Absorption

Electrons

Silica

Electron beam lithography

Lawrencium

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