Compact high-resolution homodyne interferometer for nanometer-scale multidimensional AFM metrology

Satoshi Gonda; Kazuto Kinoshita; Hironori Noguchi; Hajime Koyanagi; Tsuneo Terasawa

doi:10.1117/12.559173

2 August 2004 Compact high-resolution homodyne interferometer for nanometer-scale multidimensional AFM metrology

Satoshi Gonda, Kazuto Kinoshita, Hironori Noguchi, Hajime Koyanagi, Tsuneo Terasawa

Author Affiliations +

Proceedings Volume 5532, Interferometry XII: Applications; (2004) https://doi.org/10.1117/12.559173
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A design of a high-resolution homodyne interferometer is presented, modularized, and installed in a prototype, critical-dimension atomic force microscope (CD-AFM). A newly designed symmetrical layout of the optical path of the homodyne interferometers enabled highly stable measurements of the mechanical displacements of a wafer-positioning stage and an AFM scanner. In the performance measurement of the wafer-positioning stage, the mechanical drift after long-stroke travel and unlocking of the servo control was reduced to less than ten nanometers per minute by optimizing the preceding motion before stopping. An AFM scanner with a three-dimensional (3D) parallel spring structure has been implemented for the interferometer modules. Using a DSP-based electronic interpolation technique, displacement of the scanner was resolved and calibrated at better than 50 pm and 200 pm, respectively.

Citation Download Citation

Satoshi Gonda, Kazuto Kinoshita, Hironori Noguchi, Hajime Koyanagi, and Tsuneo Terasawa "Compact high-resolution homodyne interferometer for nanometer-scale multidimensional AFM metrology", Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); https://doi.org/10.1117/12.559173

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