Multilayer Laue lenses as high-resolution x-ray optics

Joerg Maser; Gregory B. Stephenson; Stefan Vogt; Wenbing Yun; Albert Macrander; Hyon Chol Kang; Chian Liu; Ray Conley

doi:10.1117/12.560046

4 November 2004 Multilayer Laue lenses as high-resolution x-ray optics

Joerg Maser, Gregory B. Stephenson, Stefan Vogt, Wenbing Yun, Albert Macrander, Hyon Chol Kang, Chian Liu, Ray Conley

Proceedings Volume 5539, Design and Microfabrication of Novel X-Ray Optics II; (2004) https://doi.org/10.1117/12.560046
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Using Fresnel zone plates, a spatial resolution between 20 nm for soft x-rays and 70 nm for hard x-rays has been achieved. Improvement of the spatial resolution without loss of efficiency is difficult and incremental due to the fabrication challenges posed by the combination of small outermost zone width and high aspect ratios. We describe a novel approach for high-resolution x-ray focusing, a multilayer Laue lens (MLL). The MLL concept is a system of two crossed linear zone plates, manufactured by deposition techniques. The approach involves deposition of a multilayer with a graded period, sectioning it to the appropriate thickness, assembling the sections at the optimum angle, and using it in Laue geometry for focusing. The approach is particularly well suited for high-resolution focusing optics for use at high photon energy. We present a theory of the MLL using dynamic diffraction theory and Fourier optics.

Citation Download Citation

Joerg Maser, Gregory B. Stephenson, Stefan Vogt, Wenbing Yun, Albert Macrander, Hyon Chol Kang, Chian Liu, and Ray Conley "Multilayer Laue lenses as high-resolution x-ray optics", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.560046

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