Carbon nanotube atomic force microscopy probes

Shigenobu Yamanaka; Takashi Okawa; Seiji Akita; Yoshikazu Nakayama

doi:10.1117/12.621263

10 May 2005 Carbon nanotube atomic force microscopy probes

Shigenobu Yamanaka, Takashi Okawa, Seiji Akita, Yoshikazu Nakayama

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.621263
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

We have developed a carbon nanotube atomic force microscope probe. Because the carbon nanotube are well known to have high aspect ratios, small tip radii and high stiffness, carbon nanotube probes have a long lifetime and can be applied for the observation deep trenches. Carbon nanotubes were synthesized by a well-controlled DC arc discharge method, because this method can make nanotubes to have straight shape and high crystalline. The nanotubes were aligned on the knife-edge using an alternating current electrophoresis technique. A commercially available Si probe was used for the base of the nanotube probe. The nanotube probe was fabricated by the SEM manipulation method. The nanotube was then attached tightly to the Si probe by deposition of amorphous carbon. We demonstrate the measurement of a fine pith grating that has vertical walls. However, a carbon nanotube has a problem that is called "Sticking". The sticking is a chatter image on vertical like region in a sample. We solved this problem by applying 2 methods, 1. a large cantilever vibration amplitude in tapping mode, 2. an attractive mode measurement. We demonstrate the non-sticking images by these methods.

Citation Download Citation

Shigenobu Yamanaka, Takashi Okawa, Seiji Akita, and Yoshikazu Nakayama "Carbon nanotube atomic force microscopy probes", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.621263

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