Paper
8 December 2004 Bond enhance of hydroxyapatite/silicon layers by introducing a porous silicon interlayer
Shaoqiang Chen, Jianzhong Zhu, Jian Zhang, Xiao Feng, Yanling Shi, Xiaohua Wang, Laiqiang Luo, Ziqiang Zhu
Author Affiliations +
Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607803
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
Hydroxyapatite (HAP) nano-particles obtained by coprecipitate process are deposited on porous silicon substrates, after being annealed, HAP films connected tightly with porous silicon substrates. The resulted samples were investigated by XRD, AFM and SEM.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shaoqiang Chen, Jianzhong Zhu, Jian Zhang, Xiao Feng, Yanling Shi, Xiaohua Wang, Laiqiang Luo, and Ziqiang Zhu "Bond enhance of hydroxyapatite/silicon layers by introducing a porous silicon interlayer", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607803
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KEYWORDS
Silicon

Silicon films

Picosecond phenomena

Atomic force microscopy

Crystals

Scanning electron microscopy

Semiconducting wafers

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