Index-compatible design of multilayer film for MEMS-type variable optical attenuator

Deyan Peng; Guodong Li; Lianwei Wang; Zongshen Lai

doi:10.1117/12.607904

8 December 2004 Index-compatible design of multilayer film for MEMS-type variable optical attenuator

Deyan Peng, Guodong Li, Lianwei Wang, Zongshen Lai

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607904
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

The MEMS-type Fabry-Perot cavity is used widely in some kinds of tunable optical MEMS devices. In this paper, the index compatible problem of multi-layer optical film design of Fabry-Perot cavity in the variable optical attenuator (VOA) has been investigated, which is using the transport matrix of optical medium film theoretically. Based on our theoretical model and simulation, our design for the MEMS-type Fabry-Perot cavity has better advantage of the compatibility. At first, it can be adjusted for the different working mode. Secondly, the thickness of the multi-layer film can be restructured according the refractive index of the material available. Finally, it is a self-alignment system, which makes it quite favorable for fiber alignment and procedure of package.

Citation Download Citation

Deyan Peng, Guodong Li, Lianwei Wang, and Zongshen Lai "Index-compatible design of multilayer film for MEMS-type variable optical attenuator", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607904

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