Polarization of diffraction by reflection gratings

Soe-Mie F. Nee; Tsu-Wei Nee

doi:10.1117/12.613936

30 August 2005 Polarization of diffraction by reflection grating

Soe-Mie F. Nee, Tsu-Wei Nee

Proceedings Volume 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II; 58780N (2005) https://doi.org/10.1117/12.613936
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Diffraction angles, diffraction efficiency and polarization of diffraction by a reflection grating were measured by a null ellipsometer at a wavelength of 632.8 nm. The grating is too rough to be measured by a stylus profiler or an interferometric profiler. The measured diffraction angles follow the grating equation very well and can be used to predict the period of a grating. The efficiency for different diffraction orders can be used to predict the surface profile using appropriate models. For a reflection grating with 150 grooves/mm, the measured ψ ranges from 16 to 84^o and ▵ from 96 to 361^o. This wide range of polarization is rarely seen for other kinds of samples. Depolarization is small when the efficiency is high and efficiency is small when the depolarization is large.

Citation Download Citation

Soe-Mie F. Nee and Tsu-Wei Nee "Polarization of diffraction by reflection grating", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780N (30 August 2005); https://doi.org/10.1117/12.613936

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