Multi-angle generalized ellipsometry of anisotropic optical structures

Neil A. Beaudry; Yanming Zhao; Russell Chipman

doi:10.1117/12.618163

18 August 2005 Multi-angle generalized ellipsometry of anisotropic optical structures

Neil A. Beaudry, Yanming Zhao, Russell Chipman

Author Affiliations +

Proceedings Volume 5888, Polarization Science and Remote Sensing II; 588808 (2005) https://doi.org/10.1117/12.618163
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A new technique for simultaneous multi-angle ellipsometric measurements of anisotropic optical structures such as films used in the display industry is introduced. A very small area on the sample is illuminated with a focused beam which after it interacts with the sample and is polarization analyzed is spread across a CCD. Each pixed collects light from a different angle incident on the sample allowing data collection at numerous incident angles simultaneously. The small but significant polarization aberrations of the microscope objectives provide a significant challenge to accurate measurement A mathematical description of the ellipsometric technique is presented. The optical properties of two biaxial samples, a stretched plastic retarder element used for correcting angle of incident effects in LC displays, and a thin layer of E-type polarizing dried liquid crystal material are measured and maps of the ellipsometric parameters Ψ and ▵ as a function incident and azimuthal angles are presented. Data from both samples are reduced using an iterative algorithm with a biaxial thin film modeling software package to compute all three principle components of the dielectric tensor as well as it's orientation.

Citation Download Citation

Neil A. Beaudry, Yanming Zhao, and Russell Chipman "Multi-angle generalized ellipsometry of anisotropic optical structures", Proc. SPIE 5888, Polarization Science and Remote Sensing II, 588808 (18 August 2005); https://doi.org/10.1117/12.618163

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