EUV characteristics of a high power and high repetition rate CO2 laser driven Xe plasma

Hiroshi Komori; Yoshifumi Ueno; Hideo Hoshino; Tatsuya Ariga; Akira Endo

doi:10.1117/12.616051

31 August 2005 EUV characteristics of a high power and high repetition rate CO₂ laser driven Xe plasma

Hiroshi Komori, Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga, Akira Endo

Proceedings Volume 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II; 59180H (2005) https://doi.org/10.1117/12.616051
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A CO₂ laser driven Xe jet plasma is presented as light source system for EUV lithography. A short-pulse TEA C0₂ master oscillator power amplifier system and a pre-pulse Nd:YAG laser were used for plasma generation. The dependence of EUV plasma parameters, e.g. conversion efficiency, plasma image and in-band and out-of-band spectra, on the delay time between the pre-pulse and the main pulse laser was investigated. A maximum conversion efficiency of 0.6 % was obtained at a delay time of about 200 ns. In addition, characteristics of fast ions were measured by the time-of-flight method. The peak energy of the fast ion energy distribution decreased significantly at delay times larger than 200 ns. This result is very promising with respect to collector mirror lifetime extension by magnetic field mitigation.

Citation Download Citation

Hiroshi Komori, Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga, and Akira Endo "EUV characteristics of a high power and high repetition rate CO₂ laser driven Xe plasma", Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 59180H (31 August 2005); https://doi.org/10.1117/12.616051

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