Three DOF actuator for optical parts micropositioning

Constantin Nitu; Constantin Daniel Comeaga; Bogdan Gramescu

doi:10.1117/12.639443

14 December 2005 Three DOF actuator for optical parts micropositioning

Constantin Nitu, Constantin Daniel Comeaga, Bogdan Gramescu

Proceedings Volume 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II; 597208 (2005) https://doi.org/10.1117/12.639443
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 2004, Bucharest, Romania

Abstract

The actual growth of high-technologies and future applications in micro- and nano-manufacturing have raised the need for low cost / high performance micro-positioners. Photonic packaging, optical device testing, MEMS positioning/alignment, fiber alignment, micromachining, micro-manipulation, semiconductor handling systems, microsurgery are some examples of applications, from which the most are in the optical field. Very often, micro-positioning systems with micron or submicron resolution m needed to be run open loop, without feedback position sensors. Such devices are achievable with strain actuators like piezoelectric, magnetostrictive or electrostrictive ones. Two kinds of actuators could be used, with continuous motion or with discrete motion. The first could reach all the points from a space but request real time control. The second could reach only a finite number of points in space, but the command is binary, easy to implement. The working space for discrete actuators can be reached using a lot of actuators, series connected. The paper presents a piezoelectric actuator with 3 DOF, that could be used for micro-positioning. The investigated actuator is a scale model, for checking the principle and the models.

Citation Download Citation

Constantin Nitu, Constantin Daniel Comeaga, and Bogdan Gramescu "Three DOF actuator for optical parts micropositioning", Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 597208 (14 December 2005); https://doi.org/10.1117/12.639443

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