Development of microscopic surface profile estimation algorithm through reflected laser beam analysis

Jung-Hwan Ahn; Young-Ho Seo; Hwa-Young Kim

doi:10.1117/12.642018

6 December 2005 Development of microscopic surface profile estimation algorithm through reflected laser beam analysis

Jung-Hwan Ahn, Young-Ho Seo, Hwa-Young Kim

Proceedings Volume 6049, Optomechatronic Sensors and Instrumentation; 604905 (2005) https://doi.org/10.1117/12.642018
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan

Abstract

In order to measure a surface roughness profile without contacting with surface, optical equipments are usually used. However, the light interference based measurements require a translation mechanism of nano-meter order to make phase differences or multiple focusing. That is an obstacle for the optical measurement to be applied to in-process measurement for factory automation. On the other hand the light reflectance based method do not need any moving mechanism. However, it has been known that it can measure only an average surface roughness but measure surface height profile. In this research, a new algorism is proposed to estimate a microscope surface profile from a given reflected light intensity image. The principle of the algorithm is based on statistical parameterizations of decomposed light. The proposed algorithm was proved to well estimate surface height profiles through some equipments.

Citation Download Citation

Jung-Hwan Ahn, Young-Ho Seo, and Hwa-Young Kim "Development of microscopic surface profile estimation algorithm through reflected laser beam analysis", Proc. SPIE 6049, Optomechatronic Sensors and Instrumentation, 604905 (6 December 2005); https://doi.org/10.1117/12.642018

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