An image sensor with on-die diffractive optics in 0.18&mu;m bulk CMOS

Christopher Thomas; Richard Hornsey

doi:10.1117/12.642450

6 February 2006 An image sensor with on-die diffractive optics in 0.18μm bulk CMOS

Christopher Thomas, Richard Hornsey

Proceedings Volume 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII; 606806 (2006) https://doi.org/10.1117/12.642450
Event: Electronic Imaging 2006, 2006, San Jose, California, United States

Abstract

On-die optics are an attractive way of reducing package size for imaging and non-imaging optical sensors. While systems incorporating on-die optics have been built for imaging and spectral analysis applications, these have required specialized fabrication processes and additional off-die components. This paper discusses the fabrication of an image sensor with neither of these limitations. Through careful design, an image sensor is implemented that uses on-die diffractive optics fabricated using a standard 0.18 micron bulk CMOS process, with simulations indicating that the resulting die is capable of acting as a standalone imaging system resolving spatial features to within ±0.15 radian and spectral features to within ±40 nm wavelength accuracy.

Citation Download Citation

Christopher Thomas and Richard Hornsey "An image sensor with on-die diffractive optics in 0.18μm bulk CMOS", Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 606806 (6 February 2006); https://doi.org/10.1117/12.642450

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
12 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Zone plates

Sensors

Image sensors

Imaging systems

Dielectrics

Optical components

Spatial resolution

Show All Keywords

Keywords/Phrases

Search In:

Publication Years