Novel ray-optical technique for testing of aspheric reflecting surfaces

J Bähr; U. W. Krackhardt; D. Dietrich

doi:10.1117/12.663054

25 April 2006 Novel ray-optical technique for testing of aspheric reflecting surfaces

J Bähr, U. W. Krackhardt, D. Dietrich

Proceedings Volume 6189, Optical Sensing II; 618928 (2006) https://doi.org/10.1117/12.663054
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Shape sensing of reflecting free form surfaces is achieved by deflection of an array of light pencils. The pencils showing very high depth of focus are produced by means of micro-optical components. Each pencil that interacts with the surface under test is redirected by reflection. Imaging intensity measurements, e.g. by a CCD-camera, at several propagation distances allow for determination of the propagation angle of each reflected pencil. By using the vector law of reflection the local slope of the surface at the location of reflection can be determined. Height data is obtained by depth from gradient methods known, e.g., from Hartman-Shack sensors. Both simulations and experimental results show a typical resolution of a view μm or 0.1 mrad for height or angle measurements, respectively.

Citation Download Citation

J Bähr, U. W. Krackhardt, and D. Dietrich "Novel ray-optical technique for testing of aspheric reflecting surfaces", Proc. SPIE 6189, Optical Sensing II, 618928 (25 April 2006); https://doi.org/10.1117/12.663054

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