Real-time phase correction of optical images using adaptive optics system based on MEMS technology

Jie Li; Haiqing Chen; Peng Wu; Huihui Li

doi:10.1117/12.725459

11 January 2007 Real-time phase correction of optical images using adaptive optics system based on MEMS technology

Jie Li, Haiqing Chen, Peng Wu, Huihui Li

Proceedings Volume 6279, 27th International Congress on High-Speed Photography and Photonics; 62792V (2007) https://doi.org/10.1117/12.725459
Event: 27th International congress on High-Speed Photography and Photonics, 2006, Xi'an, China

Abstract

The possibility of compensating the wave-front distortion of an optical imaging system in real time has been a subject of considerable interest. To compensate the wave-front aberration resulted by atmospheric turbulence, random gravity, heat and component surface error during manufacturing, adaptive optics is an effective way. But conventional adaptive optics has not found widespread acceptance outside the high-end astronomy community due to the cost and complexity. With the development of micro-electro-mechanical systems (MEMS) based on silicon micromaching technology, it is possible to develop a low-cost adaptive optics system. In this paper we will describe a micro-adaptive imaging system that has proved the practical feasibility of real time optical phase correction. As a key component in our adaptive optics system, a novel silicon bulk micromaching deformable mirror was used to compensate the wave-front aberration of optical image . The laboratory experiments are also presented to reveal the benefit that such system can provide. Future possible improvements are addressed as well.

Citation Download Citation

Jie Li, Haiqing Chen, Peng Wu, and Huihui Li "Real-time phase correction of optical images using adaptive optics system based on MEMS technology", Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62792V (11 January 2007); https://doi.org/10.1117/12.725459

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KEYWORDS

Mirrors

Adaptive optics

Deformable mirrors

Microelectromechanical systems

Electrodes

Silicon

Imaging systems

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