Crystallization characteristics and recording mechanism of a-Si/Ni bilayer and its potential for use in write-once Blu-ray disc

Yung-Chiun Her; Sen-Tsun Jean

doi:10.1117/12.685186

22 June 2006 Crystallization characteristics and recording mechanism of a-Si/Ni bilayer and its potential for use in write-once Blu-ray disc

Yung-Chiun Her, Sen-Tsun Jean

Author Affiliations +

Proceedings Volume 6282, Optical Data Storage 2006; 62821W (2006) https://doi.org/10.1117/12.685186
Event: Optical Data Storage 2006, 2006, Montréal, Canada

Abstract

The crystallization characteristics and recording mechanism of the a-Si (20nm)/Ni (5 nm) bilayer recording film have been studied. Upon heating, the formation of the metastable NiSi phase occurred at about 200^oC, followed by the formation of the thermodynamically favored NiSi₂ phase at ~ 400^oC, and the crystallization of a-Si mediated by the Ni silicides below 600^oC, indicating that inserting a thin Ni layer could effectively reduce the crystallization temperature of a-Si. As Si atoms of approximately 92 at% were consumed by NiSi₂ phase formation, the reflectivity increase of the a-Si/Ni bilayer recording film was contributed to the formation of NiSi₂ phase. The activation energy for Ni silicide formation was determined to be 1.98 eV. The a-Si/Ni bilayer exhibited an optical contrast of 20% and abosrptance of 54%, which can provide high enough CNR and adequate recording sensitivity. After irradiated by a 405 nm blue laser pulse, a recording mark consisting of NiSi₂ was clearly formed in the a-Si/Ni bilayer. Under the dynamic test, CNR of 37 dB was achieved at a recording power of 4 mW, demonstrating that the a-Si/Ni bilayer recording film shows a great potential for use in write-once Blu-ray disk.

Citation Download Citation

Yung-Chiun Her and Sen-Tsun Jean "Crystallization characteristics and recording mechanism of a-Si/Ni bilayer and its potential for use in write-once Blu-ray disc", Proc. SPIE 6282, Optical Data Storage 2006, 62821W (22 June 2006); https://doi.org/10.1117/12.685186

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