Designing lithographic objectives by constructing saddle points

Oana Marinescu; Florian Bociort

doi:10.1117/12.692250

13 July 2006 Designing lithographic objectives by constructing saddle points

Oana Marinescu, Florian Bociort

Proceedings Volume 6342, International Optical Design Conference 2006; 63420L (2006) https://doi.org/10.1117/12.692250
Event: International Optical Design Conference 2006, 2006, Vancouver, BC, Canada

Abstract

Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design techniques. It has significantly improved the productivity of the design process in all cases in which it has been applied so far.

Citation Download Citation

Oana Marinescu and Florian Bociort "Designing lithographic objectives by constructing saddle points", Proc. SPIE 6342, International Optical Design Conference 2006, 63420L (13 July 2006); https://doi.org/10.1117/12.692250

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