Ohmic characteristics of Pt and Ni/Au on Mg-doped AlxGa1-xN

Hoki Kwon; Bong Koo Kim; Gyong Geun Park; Sung Woo Kim; Jaewan Choi; Jeong Soo Lee; Weon G Jeong

doi:10.1117/12.689268

28 September 2006 Ohmic characteristics of Pt and Ni/Au on Mg-doped Al_xGa_1-xN

Hoki Kwon, Bong Koo Kim, Gyong Geun Park, Sung Woo Kim, Jaewan Choi, Jeong Soo Lee, Weon G Jeong

Proceedings Volume 6355, Advanced LEDs for Solid State Lighting; 63550J (2006) https://doi.org/10.1117/12.689268
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea

Abstract

Mg-doped Al_xGa_1-xN is grown by metal-organic chemical vapor deposition to investigate the Ohmic characteristics of Pt and Ni/Au. The Al solid composition measured by x-ray varies from 0.04 to 0.19, while the atomic concentration of Mg confirmed by secondary ion mass spectroscopy spans from 3x10¹⁹ to 1x10²⁰ cm^-3. The Ohmic characteristics are measured by current-voltage by varying the Mg activation temperature, Ohmic metal annealing temperature, and annealing time. The specific contact resistance is 3.5 and 7.5x10^-5 Ω cm².with Pt and Ni/Au in p-Al_0.085Ga_0.915N and p-Al_0.14Ga_0.86N measured by circular transmission line model, respectively. These are the lowest ever reported in p-AlGaN.

Citation Download Citation

Hoki Kwon, Bong Koo Kim, Gyong Geun Park, Sung Woo Kim, Jaewan Choi, Jeong Soo Lee, and Weon G Jeong "Ohmic characteristics of Pt and Ni/Au on Mg-doped Al_xGa_1-xN", Proc. SPIE 6355, Advanced LEDs for Solid State Lighting, 63550J (28 September 2006); https://doi.org/10.1117/12.689268

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