Diffractive optical elements fabricated by precise pressing of glass

Helge Vogt; Bernd Woelfing; Edgar Pawlowski

doi:10.1117/12.717952

7 March 2007 Diffractive optical elements fabricated by precise pressing of glass

Helge Vogt, Bernd Woelfing, Edgar Pawlowski

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64621E (2007) https://doi.org/10.1117/12.717952
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

This paper discusses the precise pressing technology for the fabrication of diffractive optical elements (DOEs). The new established fabrication process allows mass production of DOEs in high homogeneous optical glasses. Our precise pressing process guarantees a very constant quality over the complete production chain. Glass DOEs made by SCHOTT AG are planar optical phase elements with highly accurate shape and efficiency. The blazed profile of the diffractive optical elements was approximated by a stepped profile with up to sixteen phase levels. The highest measured diffraction efficiency for sixteen level gratings was 95%.

Citation Download Citation

Helge Vogt, Bernd Woelfing, and Edgar Pawlowski "Diffractive optical elements fabricated by precise pressing of glass", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64621E (7 March 2007); https://doi.org/10.1117/12.717952

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