Modeling of piezo-flexural nanopositioning systems subjected to rate-varying inputs

Saeid Bashash; Nader Jalili

doi:10.1117/12.715818

27 April 2007 Modeling of piezo-flexural nanopositioning systems subjected to rate-varying inputs

Saeid Bashash, Nader Jalili

Proceedings Volume 6525, Active and Passive Smart Structures and Integrated Systems 2007; 652529 (2007) https://doi.org/10.1117/12.715818
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2007, San Diego, California, United States

Abstract

A general modeling scheme is proposed for precision positioning of piezoelectrically-driven flexural systems. To describe the nonlinear behavior of the structure while also considering the system dynamics, a second order linear dynamic model subjected to nonlinear hysteretic input is first adopted. Using the memory-dependent properties of hysteresis nonlinearity, a new mathematical framework is then proposed for describing this phenomenon. More specifically, a nonlinear mapping strategy is proposed for the approximation of each of the ascending and descending multiple-loop hysteresis curves based on the shape of hysteresis reference curves. The trace of internal hysteresis trajectory is, however, obtained based on the locations of the past turning points, corresponding to the input extrema. Experimental tests are carried out on a dual-axis piezoelectrically-driven flexural stage to demonstrate the contribution of dynamic and hysteresis models, individually and combined together, on the improvement of the model response. Results indicate that the proposed hysteresis model can effectively predict the nonlinear response of the system, while the influence of dynamic model is more apparent for high rate inputs.

Citation Download Citation

Saeid Bashash and Nader Jalili "Modeling of piezo-flexural nanopositioning systems subjected to rate-varying inputs", Proc. SPIE 6525, Active and Passive Smart Structures and Integrated Systems 2007, 652529 (27 April 2007); https://doi.org/10.1117/12.715818

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