Metrology of micromirrors with replicated multilayers

L. Sveda; A. Inneman; V. Semencova; L. Pina; R. Hudec; R. Havlikova

doi:10.1117/12.733936

20 September 2007 Metrology of micromirrors with replicated multilayers

L. Sveda, A. Inneman, V. Semencova, L. Pina, R. Hudec, R. Havlikova

Author Affiliations +

Proceedings Volume 6705, Advances in X-Ray/EUV Optics and Components II; 67050D (2007) https://doi.org/10.1117/12.733936
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Replicated multilayers inside the rotationally symmetric x-ray mirrors with diameter 0.5-4 mm are being investigated. While the replicated Micromirror technology as well as replicated multilayers on the planar surface were already studied, we present here the combination of both technologies. Initial simulations and development of metrology of multilayers inside small cavities are described, as well as very first results of experiments.

Citation Download Citation

L. Sveda, A. Inneman, V. Semencova, L. Pina, R. Hudec, and R. Havlikova "Metrology of micromirrors with replicated multilayers", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050D (20 September 2007); https://doi.org/10.1117/12.733936

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