Sensor array for tracking systems

Christian Wachten; Lars Friedrich; Claas Müller; Holger Reinecke; Christoph Ament

doi:10.1117/12.754219

10 October 2007 Sensor array for tracking systems

Christian Wachten, Lars Friedrich, Claas Müller, Holger Reinecke, Christoph Ament

Proceedings Volume 6716, Optomechatronic Sensors and Instrumentation III; 67160I (2007) https://doi.org/10.1117/12.754219
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

In this paper we present a novel sensor device which can be used in a tracking system. Due to its unique design the device can replace the often used assembly consisting of a beam splitter and a quadrant diode. So, it is cost effective and eliminates the power loss introduced by the conventional assembly completely. The sensor array is not only restricted to tracking units but can also be used in other applications where beam positioning without power loss is essential. So, e.g. an online beam alignment during a measurement in microscopy is possible. Several beam profiles are supported due to the possibility to adjust the sensing elements mechanically. Furthermore a miniaturized integrated version of the device is achievable by the usage of microsystems technology.

Citation Download Citation

Christian Wachten, Lars Friedrich, Claas Müller, Holger Reinecke, and Christoph Ament "Sensor array for tracking systems", Proc. SPIE 6716, Optomechatronic Sensors and Instrumentation III, 67160I (10 October 2007); https://doi.org/10.1117/12.754219

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