Paper
21 November 2007 Manufacturing and testing of 1-m class SiC aspherical mirror
Xuejun Zhang, Zhongyu Zhang, Zhilai Li
Author Affiliations +
Proceedings Volume 6721, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 672109 (2007) https://doi.org/10.1117/12.782696
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
A 1-m class off-axis SiC aspherical mirror was polished up to 13nm rms with CCOS. The lightweight mirror structure design, CCOS procedure, as well as interferometic test set up are be presented in the paper. In addition, the residual surface error of SiC mirror is analyzed and approach to improve the surface quality is discussed.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuejun Zhang, Zhongyu Zhang, and Zhilai Li "Manufacturing and testing of 1-m class SiC aspherical mirror", Proc. SPIE 6721, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 672109 (21 November 2007); https://doi.org/10.1117/12.782696
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Cited by 3 scholarly publications.
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KEYWORDS
Mirrors

Silicon carbide

Surface finishing

Off axis mirrors

Polishing

Silicon

Structural design

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