Femtosecond laser pulses micromaching of GaAs, silicon, fused silica, PMMA

Yi Huang; Shuangchen Ruan; Yongqin Yu; Chenlin Du

doi:10.1117/12.782840

21 November 2007 Femtosecond laser pulses micromaching of GaAs, silicon, fused silica, PMMA

Yi Huang, Shuangchen Ruan, Yongqin Yu, Chenlin Du

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 672419 (2007) https://doi.org/10.1117/12.782840
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Femtosecond laser micromachining of solid materials such as Si, GaAs, polymethyl methacrylate (PMMA) and Fused Silica has been performed in air. Femtosecond (fs) laser pulses with pulse duration of 180 fs and output wavelength of 800 nm is applied for a light source. The relationship between pulse energy and sub-micron scale crater on the surface of Si, GaAs, PMMA and Fused Silica induced by fs laser pulses has been figured out. The sub-micron void can be produced in the focal point of fs laser beam. Two kinds of gratings have been fabricated on the surface of Fused Silica by femtosecond laser machining (FLM). The parameters of one grating such as the length of 20 mm, the width of 1.5 mm and the period of 2 μm have been obtained. A 20-mm-long and 0.45-mm-wide grating with period of 11 μm has been also fabricated. The diffraction efficiency of each order has been measured. An elliptical cross section waveguide has been obtained inside the bulk of Fused Silica. The distance beneath the surface was measured to be 2 mm. The diffraction rings can be observed in the far field image of the light output from the waveguide.

Citation Download Citation

Yi Huang, Shuangchen Ruan, Yongqin Yu, and Chenlin Du "Femtosecond laser pulses micromaching of GaAs, silicon, fused silica, PMMA", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672419 (21 November 2007); https://doi.org/10.1117/12.782840

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