Paper
5 February 2008 Design of Si-based electro-optical modulator employed dual capacitors
X.G. Tu, S.W. Chen, J.Z. Yu, Q.M. Wang
Author Affiliations +
Abstract
Electro-optical modulator with dual capacitors is designed and based on this design basic configuration of device is realized in laboratory. Exceeding GHz switching speed and high phase modulation efficiency can be expected with this device.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
X.G. Tu, S.W. Chen, J.Z. Yu, and Q.M. Wang "Design of Si-based electro-optical modulator employed dual capacitors", Proc. SPIE 6838, Optoelectronic Devices and Integration II, 68381B (5 February 2008); https://doi.org/10.1117/12.758361
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KEYWORDS
Oxides

Modulators

Waveguides

Capacitors

Silicon

Electrooptic modulators

Doping

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