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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688501 (2008) https://doi.org/10.1117/12.791931
This PDF file contains the front matter associated with SPIE Proceedings Volume 6885, including the Title Page, Copyright information, Table of Contents, Introduction, Conference Committee listing, and Plenary Paper.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688503 (2008) https://doi.org/10.1117/12.774948
Since the initial development of lasers in the 1960's, a longstanding dream has been to utilize these special
intense radiation (light) sources to redirect the outcome of chemical reactions. In the ensuing years, much effort has
gone into attempts at making this dream a reality. Emerging recent successful experiments derive from a confluence
of ultrafast laser technology, control theory concepts, and suitable pattern recognition algorithms all drawn together
to form adaptive machines. The adaptive machines are being used to manipulate chemical bonds, as well as a broad
variety of other atomic and molecular dynamics phenomenon. These advances rest on the ability to delicately shape
laser pulses so that they act as a special type of photonic reagents.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688504 (2008) https://doi.org/10.1117/12.769264
Today, nano-science provides an overwhelmingly large number of experimentally accessible ways to configure the spatial position of atoms, molecules, and other nanoscale components to form devices. The challenge is to find the best, most practical, configuration that yields a useful device function. In the presence of what will typically be an enormous non-convex search space, it is reasonable to assume that traditional ad-hoc design methods will miss many possible
solutions. One approach to solving this difficult problem is to employ machine-based searches of configuration space that discover user-defined objective functions. Such an optimal design methodology aims to identify the best brokensymmetry spatial configuration of metal, semiconductor, and dielectric that produce a desired response. Hence, by harnessing a combination of modern compute power, adaptive algorithms, and realistic physical models, it should be
possible to seek robust, manufacturable designs that meet previously unobtainable system specifications. Ultimately one can envision a methodology that simultaneously is capable of basic scientific discovery and engineering for technological applications.
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A. J. Rimberg, W. W. Xue, Z. Ji, F. Pan, J. Stettenheim, T. J. Gilheart
Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688505 (2008) https://doi.org/10.1117/12.778262
Any scientific instrument, including an electrical amplifier, necessarily adds noise in the process of performing a
measurement. As might be expected from knowledge of Heisenberg's uncertainty principle, quantum mechanics
sets strict limits on how little noise a measurement can add. There is a great deal of current interest in performing
measurements at the quantum limit on such systems as qubits and nanomechanical resonators. Here we introduce
the notion of quantum limited electrical measurement, and discuss recent progress made toward this goal.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688506 (2008) https://doi.org/10.1117/12.775806
Heterodimerization between designed helix-loop-helix polypeptides was utilized in order to assemble gold nanoparticles
on planar substrates. The peptides were designed to fold into four-helix bundles upon dimerization. A Cys-residue in the
loop region was used to immobilize one of the complementary peptides on a maleimide containing SAM on planar gold
substrates whereas the second peptide was immobilized directly on gold nanoparticles. Introducing the peptide
decorated particles over a peptide functionalized surface resulted in particle assembly. Further, citrate stabilized
particles were assembled on amino-silane modified glass and silicon substrates. By subsequently introducing peptides
and gold nanoparticles, particle-peptide hybrid multi layers could be formed.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688507 (2008) https://doi.org/10.1117/12.768715
We present a microfluidic chemical/biological sensor based on dissolvable membranes incorporating gold
nanoparticles. The presence of the target analyte in a fluidic sample being assayed dissolves the membrane,
causing the change in its optical absorption. To enhance the contrast between the membrane and the fluidic sample,
the membranes are chemically treated to exhibit strong absorption at certain wavelengths. Here, we use
N,N'-cystaminebisacrylamide (CBA) cross-linked poly(acrylamide) (PAAm) membranes dissolved by a sample
solution containing dithioerythritol (DTT) to demonstrate this approach. The dissolvable membrane incorporates
gold nanoparticles to exhibit strong absorption at 572nm.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688508 (2008) https://doi.org/10.1117/12.769621
This paper reports the design, fabrication and measurements of a dual-reflective, single-crystal silicon based micromirror
that can perform full circumferential scanning (FCS) for endoscopic optical coherence tomography (EOCT). In the
proposed FCS-EOCT probe, two optical fibers are used to deliver light beams to either surface of the micromirror, which
can rotate ±45° (or 90°) and thus a 180° optical scanning is obtained from each mirror surface, resulting in full
circumferential scans. A novel surface- and bulk-combined micromachining process based on SOI wafers is developed
for fabricating the dual reflective micromirror. The single-crystal-silicon device layer of SOI wafers is used for mirror
flatness, and Al is coated on both sides for high reflectivity. With one light beam delivered to each mirror surface, full
360° scans have been observed. Other measured data include the resonant frequency: 328Hz, radius of curvatures: - 124 mm (front surface) and 127 mm (back surface), and the reflectances: 81.3% (front surface) and 79.0% (back surface).
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Ehsan Saeedi, Samuel Kim, Harvey Ho, Babak A. Parviz
Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688509 (2008) https://doi.org/10.1117/12.768289
We present the design and construction of a micro-display consisting of independently microfabricated light emitting
diodes (LEDs) and silicon transistors on unconventional substrates such as flexible plastics. The fabrication process
takes advantage of self-assembly to form the display. Silicon microcomponents and AlGaAs red LEDs were
microfabricated and released to form a powder-like collection of parts. A plastic template containing binding sites was
independently microfabricated. Each binding site on the template consisted of a well with a shape complementary to that
of the released component. Self-assembly process was conducted in a fluidic medium to allow the microcomponents to
assemble in proper receptor sites on the flexible template. We showed self-assembly of both LEDs and driving circuitry
for display on plastic template. We got more than 90% yield for physically positioning the parts on template, with
electrical connection yield of 62%.
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Ashkan Behnam, Jason L. Johnson, Yongho Choi, M. Günhan Ertosun, Zhuangchun Wu, Andrew G. Rinzler, Pawan Kapur, Krishna C. Saraswat, Ant Ural
Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850A (2008) https://doi.org/10.1117/12.761935
We fabricate and experimentally characterize metal-semiconductor-metal (MSM) photodetectors with CNT film
Schottky electrodes on n-type and p-type silicon substrates. We extract a Schottky barrier height of ~0.45 eV and ~0.51
eV for CNT films on n-type and p-type Si respectively. The extracted barrier height corresponds to a CNT film
workfunction of 4.5-4.7 eV, which is within the range of the previously reported workfunction values for individual
CNTs. Furthermore, we find that while at temperatures above 240°K thermionic emission is the dominant transport
mechanism, at lower temperatures tunneling begins to dominate. We also characterize the photoresponse of the CNT
film-Si MSM photodetector by illuminating the samples with a 633 nm HeNe laser. We observe that while the
photocurrent of the CNT film MSM devices is similar to that of the Ti/Au control samples at high biases, their lower
dark current results in a higher photo-to-dark current ratio relative to the control devices. We explain these observations
by comparing the two interfaces. This work opens up the possibility of integrating CNT films as transparent and
conductive Schottky electrodes in conventional semiconductor electronic and optoelectronic devices.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850B (2008) https://doi.org/10.1117/12.769590
A reduced order thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported.
Thermal bimorphs with integrated Pt resistors are used for generating the angular rotation. Neglecting the temperature
variation perpendicular to the length of the bimorphs, a 2D finite element thermal model with 4647 nodes is built. The
accuracy of the model is verified by comparing the simulation results with thermal imaging data. Using a Krylov
subspace based algorithm, a reduced order model is extracted from the finite element model. Results obtained from a
reduced model with order ≥ 5 agree well with finite element results. Hence, a reduced order thermal model that saves
computation time and resources without compromising the computation accuracy has been demonstrated.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850D (2008) https://doi.org/10.1117/12.769137
The applicability of an existing compact model that captures the effect of rarefaction and inertia is studied in this
paper. In order to ascertain the accuracy of the model, we take two different configurations of a torsional MEMS
structure from the literature which operate under different frequencies and have different air-gap thicknesses.
For the structure with large air-gap and low operating frequency, the analytical model based on the equivalent
length captures the effect well under the continuum, slip, transition and the molecular regimes. On the other
hand, for the structures with high operating frequencies but low air-gap thickness, the analytical model breaks
down in the transition regime.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850E (2008) https://doi.org/10.1117/12.760913
Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications
in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the
resonance frequency shift due to the added mass of the molecules bound to the cantilever surface.
This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on
submicron cantilevers. The influence of the mechanical properties of the adsorbed molecules bound to the upper and
lower surface on the resonance frequency has been studied. For various materials, the ratio between the thicknesses of
the adsorbed layer and the cantilever where either stiffness or added mass is dominant will be determined. The critical
ratio (which contribution of effect cancel each others) between the thickness of the adsorbed layer and the cantilever and
ratio between stiffness and density of adsorbed layer and cantilever have been determined. The calculations show the
added mass and stiffness how contribute to the resonant behavior. This model gives insight into the decoupling of both
opposite effects and is expected to be useful for the optimal design of resonators with high sensitivity to molecular
adsorption based on either stiffness or mass effects.
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Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850G (2008) https://doi.org/10.1117/12.775801
Nanowires of a diameter less than 50nm have been predicted to exhibit a higher thermoelectric figure of merit in
comparison to their bulk equivalent. In order to experimentally measure the thermoelectric power in nanowires it is
necessary to design and fabricate a measurement platform that is ideally matched in thermal and physical size and
capable of testing a large number of individual nanowires in a high throughput manner. In this paper we present the
design, fabrication, and characterization of a MEMS thermoelectric workbench with a high density of testing locations.
Characteristic measurements of the thermoelectric power of Au nanowires are presented as demonstration of the
workbench functionality.
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Sungmuk Kang, Hyejoong Kim, Hoseong Kim, Changwook Baek
Proceedings Volume MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850H (2008) https://doi.org/10.1117/12.762037
Energy scavenging is a technology that derives required microwatt level power to drive electronics from ambient heat,
light, radio, or vibration, that is otherwise wasted. In this study, we have investigated the circuit optimization strategy for
vibration-based piezoelectric energy scavenging systems that supply the electric power to wireless sensors and
electronics for ubiquitous sensor networks. In this paper, we assert that not only the mechanical to electrical energy
conversion efficiency, but also the speed of energy storage is important in designing and evaluation of energy
scavenging system, since the energy scavenging system with higher speed of energy storage has faster start up response
to the mechanical input and can supply required power more frequently. Particularly in case of piezoelectric micropower
generator, we show that the low reverse leakage current characteristic rather than the low forward voltage drop of the
rectifying diodes is much more beneficial to improve conversion efficiency and that the storage capacitor should be as
small as possible to reduce the time to store required amount of energy. Experimental and PSPICE results show that,
when ultra-low leakage current diodes are adopted for a bridge rectifier, the mechanical-to-electrical energy conversion
efficiency is doubled or more in some cases, and the charging speed is increased by 20%, compared to the circuit that
adopts Schottky diodes. It is also found that, compared to the circuit with larger storage capacitor, the circuit with
smaller storage capacitor requires shorter time to store the same amount of energy and can drive voltage regulator more
frequently. This study suggests that low reverse leakage diode and small storage capacitor should be used to build
efficient high performance piezoelectric energy scavenging systems for ubiquitous sensor networks.
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