Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki; Mototaka Arakawa; Tetsuji Ueda; Akira Fujinoki

doi:10.1117/12.772259

21 March 2008 Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki, Mototaka Arakawa, Tetsuji Ueda, Akira Fujinoki

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Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69213P (2008) https://doi.org/10.1117/12.772259
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

In this paper, we tried to fabricate a TiO₂-doped SiO₂ (TiO₂-SiO₂) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

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Jun-ichi Kushibiki, Mototaka Arakawa, Tetsuji Ueda, and Akira Fujinoki "Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69213P (21 March 2008); https://doi.org/10.1117/12.772259

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