Dielectric elastomer actuators using improved thin film processing and nanosized particles

Peter Lotz; Marc Matysek; Pia Lechner; Monika Hamann; Helmut F. Schlaak

doi:10.1117/12.776197

10 April 2008 Dielectric elastomer actuators using improved thin film processing and nanosized particles

Peter Lotz, Marc Matysek, Pia Lechner, Monika Hamann, Helmut F. Schlaak

Proceedings Volume 6927, Electroactive Polymer Actuators and Devices (EAPAD) 2008; 692723 (2008) https://doi.org/10.1117/12.776197
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

Stacked dielectric elastomer actuators are fabricated by an automated process using spin coating of uncured elastomers. To improve the performance of these multilayer actuators we present two different ways. To reduce the driving voltage it is desirable to fabricate dielectric films with a thickness below 20 μm. This can be achieved by high speed spin coating of an uncured elastomer. Analyzing the automated process reveals nine principal process parameters. An adequate design of experiment reduces the number of necessary tests to an acceptable value. With these results we are able to spin thin films with a thickness of less than 5 μm and a thickness variation of about 3%. Secondly, we examine the influence of nanosized particles of metal oxide powder on the permittivity of the elastomer film. Three different materials, namely aluminiumoxide, titaniumdioxide and bariumtitanate with a bulk permittivity of about 10, 100, 1000, respectively, are used to increase the overall permittivity of the composite. To predict the resulting performance of an elastomer actuator the figure of merit Κ is introduced.

Citation Download Citation

Peter Lotz, Marc Matysek, Pia Lechner, Monika Hamann, and Helmut F. Schlaak "Dielectric elastomer actuators using improved thin film processing and nanosized particles", Proc. SPIE 6927, Electroactive Polymer Actuators and Devices (EAPAD) 2008, 692723 (10 April 2008); https://doi.org/10.1117/12.776197

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