Design and properties of STW resonators on AT-quartz

Hualei Wang; Yu Shi; Hui Zhong; Xiangdong Jiang

doi:10.1117/12.792196

11 March 2008 Design and properties of STW resonators on AT-quartz

Hualei Wang, Yu Shi, Hui Zhong, Xiangdong Jiang

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69843H (2008) https://doi.org/10.1117/12.792196
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Surface transverse waves (STW) resonators exhibit substantial advantages over conventional surface acoustic wave (SAW) resonators without further demands for new materials or improved design and technology. They demonstrate higher operating frequencies, better temperature stability, higher intrinsic material quality and etc. In this work, the low loss and high quality factor STW with center frequency at 421 MHz fabricated with a line width of 3 μm were uniquely designed and fabricated on AT quartz substrate. The insertion loss of the device was as low as 2 dB, and the loaded quality factor was as high as 1000. Insertion losses as function of structure parameters are discussed.

Citation Download Citation

Hualei Wang, Yu Shi, Hui Zhong, and Xiangdong Jiang "Design and properties of STW resonators on AT-quartz", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843H (11 March 2008); https://doi.org/10.1117/12.792196

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