Quick and non-invasive method for characterisation of profiles of nano-photonics structures

Szymon Lis; Rafal Dylewicz; Jarosław Myśliwiec; Andrzej Miniewicz; Sergiusz Patela

doi:10.1117/12.785813

21 April 2008 Quick and non-invasive method for characterisation of profiles of nano-photonics structures

Szymon Lis, Rafal Dylewicz, Jarosław Myśliwiec, Andrzej Miniewicz, Sergiusz Patela

Proceedings Volume 6989, Photonic Crystal Materials and Devices VIII; 698917 (2008) https://doi.org/10.1117/12.785813
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

Depth and profile information of one or two-dimensional photonic crystals can be obtained through measurements of reflective diffractive patters obtained from the structures and subsequent numerical analysis. The technique is known as a scatterometry. The method is non-invasive and fast, and competitive to the alternatives of AFM, SEM etc. In our paper we presented results of investigation 1D photonic crystal fabricated in GaN with period Λ = 400 nm, fill factor ff = 50% and depth d = 400 nm. Using computer algorithm of Rigorous Coupled Wave Analysis (RCWA) and measuring diffracted light we extracted the profile parameters of Λ = 420 nm, ff = 51%, d = 400 nm. Possibility of application of our method for analysis 2D photonic crystals is discussed also.

Citation Download Citation

Szymon Lis, Rafal Dylewicz, Jarosław Myśliwiec, Andrzej Miniewicz, and Sergiusz Patela "Quick and non-invasive method for characterisation of profiles of nano-photonics structures", Proc. SPIE 6989, Photonic Crystal Materials and Devices VIII, 698917 (21 April 2008); https://doi.org/10.1117/12.785813

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