Performance analysis of Shack-Hartmann wavefront sensor

Hongli Chen; Linhui Chen; Changhui Rao

doi:10.1117/12.819586

31 December 2008 Performance analysis of Shack-Hartmann wavefront sensor

Hongli Chen, Linhui Chen, Changhui Rao

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71301C (2008) https://doi.org/10.1117/12.819586
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

A detailed analysis of the principle of Shack-Hartmann wavefront sensor is presented. Typical performance metrics such as dynamic range, sensitivity, repeatability and accuracy are defined and discussed. A method with which to calibrate a Shack-Hartmann wavefront sensor for absolute wavefront measurement for tilt without any accessorial apparatus is studied, and the method is tested by experiment.

Citation Download Citation

Hongli Chen, Linhui Chen, and Changhui Rao "Performance analysis of Shack-Hartmann wavefront sensor", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71301C (31 December 2008); https://doi.org/10.1117/12.819586

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