Laser micro/nanoprocessing for functional electronics

Seung Hwan Ko; Heng Pan; Costas P. Grigoropoulos

doi:10.1117/12.816408

17 April 2009 Laser micro/nanoprocessing for functional electronics

Seung Hwan Ko, Heng Pan, Costas P. Grigoropoulos

Proceedings Volume 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; 71311S (2009) https://doi.org/10.1117/12.816408
Event: XVII International Symposium on Gas Flow and Chemical Lasers and High Power Lasers, 2008, Lisboa, Portugal

Abstract

Inkjet direct writing of functional materials provides a promising pathway towards realization of ultra-low-cost, largearea printed electronics, albeit at the expense of lowered resolution (~20-50 μm). We demonstrate that selective laser sintering and ablation of inkjet-printed metal nanoparticles enables low-temperature metal deposition as well as highresolution patterning. Combined with an air-stable carboxylate-functionalized polythiophene, all-inkjet-printed and laser-processed organic field effect transistors with micron to submicron critical feature resolution were fabricated in a fully maskless sequence, eliminating the need for any lithographic processes. All processing and characterization steps were carried out at plastic-compatible low temperatures and in air under ambient pressure. The fundamental mechanisms of the nanoparticle sintering process have been investigated by both Molecular Dynamics (MD) simulations as well as in-situ probing.

Citation Download Citation

Seung Hwan Ko, Heng Pan, and Costas P. Grigoropoulos "Laser micro/nanoprocessing for functional electronics", Proc. SPIE 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 71311S (17 April 2009); https://doi.org/10.1117/12.816408

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