PROCEEDINGS VOLUME 7140
SPIE LITHOGRAPHY ASIA - TAIWAN | 4-6 NOVEMBER 2008
Lithography Asia 2008
Editor Affiliations +
Proceedings Volume 7140 is from: Logo
SPIE LITHOGRAPHY ASIA - TAIWAN
4-6 November 2008
Taipei, Taiwan
Front Matter: Volume 7140
Proceedings Volume Lithography Asia 2008, 714001 (2008) https://doi.org/10.1117/12.820873
EUVL Technology
D. N. Ruzic, R. Raju, J. Sporre, H. Shin, W. M. Lytle, M. J. Neumann
Proceedings Volume Lithography Asia 2008, 714006 (2008) https://doi.org/10.1117/12.804689
E. Hendrickx, A. M. Goethals, A. Niroomand, R. Jonckheere, F. Van Roey, G. F. Lorusso, J. Hermans, B. Baudemprez, K. Ronse
Proceedings Volume Lithography Asia 2008, 714007 (2008) https://doi.org/10.1117/12.805408
Proceedings Volume Lithography Asia 2008, 714009 (2008) https://doi.org/10.1117/12.804673
Emergent Lithographic Technology
Proceedings Volume Lithography Asia 2008, 71400A (2008) https://doi.org/10.1117/12.810264
Jay Wang-Chieh Yu, Yoo-Bin Guo, Jiun-Yeu Chen, Franklin Chau-Nan Hong
Proceedings Volume Lithography Asia 2008, 71400C (2008) https://doi.org/10.1117/12.806888
CD Metrology
J. Foucher, E. Pargon, M. Martin, V. Farys, S. Bécu, L. Babaud
Proceedings Volume Lithography Asia 2008, 71400F (2008) https://doi.org/10.1117/12.805296
Marlene Strobl, Lisa Huang, Allen Li, Ying Luo, Youxian Wen
Proceedings Volume Lithography Asia 2008, 71400G (2008) https://doi.org/10.1117/12.804636
Proceedings Volume Lithography Asia 2008, 71400H (2008) https://doi.org/10.1117/12.804482
M. Foldyna, A. De Martino, D. Cattelan, F. Bogeat, C. Licitra, J. Foucher, P. Barritault, J. Hazart
Proceedings Volume Lithography Asia 2008, 71400I (2008) https://doi.org/10.1117/12.804682
M. Foldyna, A. De Martino, R. Ossikovski, E. Garcia-Caurel, D. Cattelan, C. Licitra
Proceedings Volume Lithography Asia 2008, 71400J (2008) https://doi.org/10.1117/12.804690
Process Control and Metrology
Proceedings Volume Lithography Asia 2008, 71400K (2008) https://doi.org/10.1117/12.808005
Chia Tsung Hung, Chung Ping Hsia, Tzu Shen Cheng, Chun Yen Huang, Wen Bin Wu, Chiang Lin Shih
Proceedings Volume Lithography Asia 2008, 71400M (2008) https://doi.org/10.1117/12.804663
Jimmy Hu, Chih-Ming Ke, Willie Wang, Jacky Huang, H. L. Chung, C. R. Liang, Victor Shih, H. H. Liu, H. J. Lee, et al.
Proceedings Volume Lithography Asia 2008, 71400N (2008) https://doi.org/10.1117/12.807998
Lithography Process Control
Proceedings Volume Lithography Asia 2008, 71400Q (2008) https://doi.org/10.1117/12.805314
Daniel Chen, Damian Chen, Ray Yen, Mingjen Cheng, Andy Lan, Rajesh Ghaskadvi
Proceedings Volume Lithography Asia 2008, 71400R (2008) https://doi.org/10.1117/12.804563
P. R. Jeng, C. L. Lin, Simon Jang, M. S. Liang, Wallas Chen, David Tsui, Damian Chen, Henry Chen, Chris Young, et al.
Proceedings Volume Lithography Asia 2008, 71400S (2008) https://doi.org/10.1117/12.804526
Steven Rowley, Jerry Yang, Andy Wei
Proceedings Volume Lithography Asia 2008, 71400U (2008) https://doi.org/10.1117/12.803919
Defect Inspection
Aris Chen, Victor Huang, Sophie Chen, C. J. Tsai, Kenneth Wu, Haiping Zhang, Kevin Sun, Jason Saito, Henry Chen, et al.
Proceedings Volume Lithography Asia 2008, 71400W (2008) https://doi.org/10.1117/12.804558
Kensuke Inai, Kaoru Ohya, Hideaki Kuwada, Ryosuke Kawasaki, Misako Saito, Kaoru Fujihara, Teruyuki Hayashi, Jack Jau, Kenichi Kanai
Proceedings Volume Lithography Asia 2008, 71400X (2008) https://doi.org/10.1117/12.804461
Z. Y. Chen, I. C. Chou, J. H. Yang, Wallas Chen, Josh Chang, Henry Chen, Melvin Ng, Meng-Che Wu, Cathy Perry-Sullivan, et al.
Proceedings Volume Lithography Asia 2008, 71400Y (2008) https://doi.org/10.1117/12.804661
Optical (Imaging)
Stephen Hsu, Luoqi Chen, Zhipan Li, Sean Park, Keith Gronlund, Hua-Yu Liu, Neal Callan, Robert Socha, Steve Hansen
Proceedings Volume Lithography Asia 2008, 714010 (2008) https://doi.org/10.1117/12.806657
Seiro Miyoshi, Yuuji Kobayashi, Satoshi Tanaka, Kenji Kawano, Kohji Hashimoto, Soichi Inoue
Proceedings Volume Lithography Asia 2008, 714011 (2008) https://doi.org/10.1117/12.804638
Eytan Barouch, Stephen L. Knodle
Proceedings Volume Lithography Asia 2008, 714012 (2008) https://doi.org/10.1117/12.804271
Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao
Proceedings Volume Lithography Asia 2008, 714014 (2008) https://doi.org/10.1117/12.804678
Optical (Imaging) II
Proceedings Volume Lithography Asia 2008, 714015 (2008) https://doi.org/10.1117/12.804709
Kazuhiro Takahata, Masanari Kajiwara, Yosuke Kitamura, Tomoko Ojima, Masaki Satake, Hiroharu Fujise, Yuriko Seino, Tatsuhiko Ema, Manabu Takakuwa, et al.
Proceedings Volume Lithography Asia 2008, 714017 (2008) https://doi.org/10.1117/12.804739
Proceedings Volume Lithography Asia 2008, 714018 (2008) https://doi.org/10.1117/12.805438
Richard Tu, Gregory McIntyre
Proceedings Volume Lithography Asia 2008, 714019 (2008) https://doi.org/10.1117/12.804610
Xu Ma, Gonzalo R. Arce
Proceedings Volume Lithography Asia 2008, 71401A (2008) https://doi.org/10.1117/12.803408
Wim de Boeij, Gerald Dicker, Marten de Wit, Frank Bornebroek, Mark Zellenrath, Harm-Jan Voorma, Bart Smeets, Rene Toussaint, Bart Paarhuis, et al.
Proceedings Volume Lithography Asia 2008, 71401B (2008) https://doi.org/10.1117/12.805381
EUV Scanner and Sources
Katsuhiko Murakami, Tetsuya Oshino, Hiroyuki Kondo, Hiroshi Chiba, Kazushi Nomura, Hidemi Kawai, Yoshiaki Kohama, Kenji Morita, Kazunari Hada, et al.
Proceedings Volume Lithography Asia 2008, 71401C (2008) https://doi.org/10.1117/12.804706
Proceedings Volume Lithography Asia 2008, 71401E (2008) https://doi.org/10.1117/12.806648
Proceedings Volume Lithography Asia 2008, 71401F (2008) https://doi.org/10.1117/12.804687
Emergent Imaging Technology
Chun-Hung Liu, Hoi-Tou Ng, Philip C. W. Ng, Kuen-Yu Tsai, Shy-Jay Lin, Jeng-Homg Chen
Proceedings Volume Lithography Asia 2008, 71401I (2008) https://doi.org/10.1117/12.804693
Proceedings Volume Lithography Asia 2008, 71401J (2008) https://doi.org/10.1117/12.805399
Proceedings Volume Lithography Asia 2008, 71401K (2008) https://doi.org/10.1117/12.804651
EUV Infrastructure
Proceedings Volume Lithography Asia 2008, 71401N (2008) https://doi.org/10.1117/12.804570
Litho Mask Technology
W. M. Lytle, D. S. Szybilski, C. E. Das, R. Raju, V. Surla, M. J. Neumann, D. N. Ruzic
Proceedings Volume Lithography Asia 2008, 71401S (2008) https://doi.org/10.1117/12.804704
Yoshihiro Takada, Matoko Fukui, Tsunehiro Sai
Proceedings Volume Lithography Asia 2008, 71401T (2008) https://doi.org/10.1117/12.804628
Wen-Jui Tseng, Shean-Hwan Chiou, Ming-Chien Chiu, Po-shin Lee
Proceedings Volume Lithography Asia 2008, 71401V (2008) https://doi.org/10.1117/12.804629
Proceedings Volume Lithography Asia 2008, 71401W (2008) https://doi.org/10.1117/12.804681
Optical (DPT)
Proceedings Volume Lithography Asia 2008, 71401X (2008) https://doi.org/10.1117/12.804697
Tsann-Bim Chiou, Robert Socha, Ho-Young Kang, Alek C. Chen, Stephen Hsu, Hong Chen, Luoqi Chen
Proceedings Volume Lithography Asia 2008, 71401Z (2008) https://doi.org/10.1117/12.804763
Hee-Youl Lim, Kyo-Young Jang, Jae-Heon Kim, Sung-Gu Lee, Sarohan Park, Tae-Hwan Kim, Cheol-Kyu Bok, Seung-Chan Moon
Proceedings Volume Lithography Asia 2008, 714020 (2008) https://doi.org/10.1117/12.804657
M. C. Chiu, Benjamin Szu-Min Lin, M. F. Tsai, Y. S. Chang, M. H. Yeh, T. H. Ying, Chris Ngai, Jaklyn Jin, Stephen Yuen, et al.
Proceedings Volume Lithography Asia 2008, 714021 (2008) https://doi.org/10.1117/12.804685
Optical (DPT Process)
Kohji Hashimoto, Hidefumi Mukai, Seiro Miyoshi, Shinji Yamaguchi, Hiromitsu Mashita, Yuuji Kobayashi, Kenji Kawano, Takashi Hirano
Proceedings Volume Lithography Asia 2008, 714022 (2008) https://doi.org/10.1117/12.804744
Proceedings Volume Lithography Asia 2008, 714023 (2008) https://doi.org/10.1117/12.805239
Proceedings Volume Lithography Asia 2008, 714024 (2008) https://doi.org/10.1117/12.804627
Scott Corboy, Craig MacNaughton, Thomas Gubiotti, Marcus Wollenweber
Proceedings Volume Lithography Asia 2008, 714025 (2008) https://doi.org/10.1117/12.804578
Advanced Exposure Tool Control
Joost Bekaert, L. Van Look, P. De Bisschop, J. Van de Kerkhove, G, Vandenberghe, K. Schreel, J. Menger, G. Schiffelers, E. Knols, et al.
Proceedings Volume Lithography Asia 2008, 714027 (2008) https://doi.org/10.1117/12.804670
Proceedings Volume Lithography Asia 2008, 714028 (2008) https://doi.org/10.1117/12.804647
Proceedings Volume Lithography Asia 2008, 71402A (2008) https://doi.org/10.1117/12.804488
Optical (OPC)
Lawrence S. Melvin III, Josh Tuttle, Mathias Boman
Proceedings Volume Lithography Asia 2008, 71402B (2008) https://doi.org/10.1117/12.810062
Proceedings Volume Lithography Asia 2008, 71402D (2008) https://doi.org/10.1117/12.804621
Ryan Chou, Li-Tung Hsiao, H. Y. Liao, Jack Lin, Regina Shen, Jochen Schacht, Dyiann Chou, Srividya Jayaram, Pat LaCour
Proceedings Volume Lithography Asia 2008, 71402E (2008) https://doi.org/10.1117/12.804707
Proceedings Volume Lithography Asia 2008, 71402G (2008) https://doi.org/10.1117/12.804632
Novel Resist Material and Processing
Tomoyuki Ando, Masaru Takeshita, Ryoich Takasu, Yasuhiro Yoshii, Jun Iwashita, Shogo Matsumaru, Sho Abe, Takeshi Iwai
Proceedings Volume Lithography Asia 2008, 71402H (2008) https://doi.org/10.1117/12.804710
Deyan Wang, Chunyi Wu, Cheng Bai Xu, George Barclay, Peter Trefonas, Shuji Dinglee
Proceedings Volume Lithography Asia 2008, 71402I (2008) https://doi.org/10.1117/12.805299
Richard Harding, Iain Gardiner, Hyun-Jin Yoon, Tara Perrett, Owain Parri, Karl Skjonnemand
Proceedings Volume Lithography Asia 2008, 71402J (2008) https://doi.org/10.1117/12.805378
Dai Shiota, Akira Katano, Masaru Shida, Kiyoshi Uchikawa
Proceedings Volume Lithography Asia 2008, 71402K (2008) https://doi.org/10.1117/12.804829
Novel Resist Material and Processing II
Msanori Yashiro, Masaru Ohta
Proceedings Volume Lithography Asia 2008, 71402M (2008) https://doi.org/10.1117/12.804645
Yuji Tashiro, Takeshi Sekito, Takafumi Iwata, Daishi Yokoyama, Toshiaki Nonaka
Proceedings Volume Lithography Asia 2008, 71402O (2008) https://doi.org/10.1117/12.804669
Proceedings Volume Lithography Asia 2008, 71402P (2008) https://doi.org/10.1117/12.804692
Wen-Hao Wu, Edward Y. Chang, Hwan-Sung Cheon, Sang Kyun Kim, Hyeon Mo Cho, Kyong-Ho Yoon, Jong Seob Kim, Tuwon Chang, Seongho Shin
Proceedings Volume Lithography Asia 2008, 71402Q (2008) https://doi.org/10.1117/12.804695
Advanced Materials
Hwan-Sung Cheon, Kyong-Ho Yoon, Min-Soo Kim, Seung Bae Oh, Jee-Yun Song, Nataliya Tokareva, Jong-Seob Kim, Tuwon Chang
Proceedings Volume Lithography Asia 2008, 71402R (2008) https://doi.org/10.1117/12.804635
Joseph Kennedy, Song-Yuan Xie, Ze-Yu Wu, Ron Katsanes, Kyle Flanigan, Kevin Lee, Mark Slezak, Nicolette Fender, Junichi Takahashi
Proceedings Volume Lithography Asia 2008, 71402S (2008) https://doi.org/10.1117/12.804699
Ruzhi Zhang, Allen G. Timko, Lyudmila Pylneva, Jennifer Loch, Hengpeng Wu, David J. Abdallah, Richard A. Collett, Yayi Wei, Dalil Rahman, et al.
Proceedings Volume Lithography Asia 2008, 71402T (2008) https://doi.org/10.1117/12.804748
Proceedings Volume Lithography Asia 2008, 71402U (2008) https://doi.org/10.1117/12.804729
Sang Kyun Kim, Hyeon Mo Cho, Changsoo Woo, Sang Ran Koh, Mi-Young Kim, Hui Chan Yoon, Woojin Lee, Seung-Wook Shin, Jong-Seob Kim, et al.
Proceedings Volume Lithography Asia 2008, 71402V (2008) https://doi.org/10.1117/12.804399
Advanced Materials II
Proceedings Volume Lithography Asia 2008, 71402X (2008) https://doi.org/10.1117/12.804617
Aiwen Wu, Wailup Chow
Proceedings Volume Lithography Asia 2008, 71402Y (2008) https://doi.org/10.1117/12.804691
Toru Umeda, Takeo Ishibashi, Atsushi Nakamura, Junichi Ide, Masaru Nagano, Koichi Omura, Shuichi Tsuzuki, Toru Numaguchi
Proceedings Volume Lithography Asia 2008, 71402Z (2008) https://doi.org/10.1117/12.804672
Poster Session
Seongbo Shim, Young-chang Kim, Yong-jin Chun, Seong-Woo Lee, Suk-joo Lee, Seong-woon Choi, Woo-sung Han, Seong-hoon Chang, Seok-chan Yoon, et al.
Proceedings Volume Lithography Asia 2008, 714030 (2008) https://doi.org/10.1117/12.804668
Jung Hoon Oh, Dong Chul Seo, Hyun Sang Joo, Sung Do Jung, Jin Ho Kim, Seung Jae Lee, Ran Ra Park, JoonHee Han, Joo Hyeon Park
Proceedings Volume Lithography Asia 2008, 714031 (2008) https://doi.org/10.1117/12.804631
Proceedings Volume Lithography Asia 2008, 714032 (2008) https://doi.org/10.1117/12.804671
Proceedings Volume Lithography Asia 2008, 714033 (2008) https://doi.org/10.1117/12.804649
Proceedings Volume Lithography Asia 2008, 714034 (2008) https://doi.org/10.1117/12.804646
Proceedings Volume Lithography Asia 2008, 714035 (2008) https://doi.org/10.1117/12.808003
Daisuke Maruyama, Bang-Ching Ho, Sangwoong Yoon, Rikimaru Sakamoto, Yasushi Sakaida, Keisuke Hashimoto, Noriaki Fujitani, Hiroaki Yaguchi, Koutastu Matsubara
Proceedings Volume Lithography Asia 2008, 714037 (2008) https://doi.org/10.1117/12.804490
Proceedings Volume Lithography Asia 2008, 714038 (2008) https://doi.org/10.1117/12.804643
Proceedings Volume Lithography Asia 2008, 714039 (2008) https://doi.org/10.1117/12.804675
Osamu Miyahara, Hitoshi Kosugi, Shannon Dunn, Youri van Dommelen, Cedric Grouwstra
Proceedings Volume Lithography Asia 2008, 71403A (2008) https://doi.org/10.1117/12.804677
Proceedings Volume Lithography Asia 2008, 71403C (2008) https://doi.org/10.1117/12.804260
Max Chung, Hung-Yi Lin, Jen-Hui Tsai
Proceedings Volume Lithography Asia 2008, 71403D (2008) https://doi.org/10.1117/12.803835
Proceedings Volume Lithography Asia 2008, 71403E (2008) https://doi.org/10.1117/12.804654
Fu-Sheng Chu, Shean-Hwan Chiou
Proceedings Volume Lithography Asia 2008, 71403F (2008) https://doi.org/10.1117/12.803784
Jung-Chan Kim, Taehyeong Lee, Areum Jung, Gyun Yoo, Hyunjo Yang, Donggyu Yim, Sungki Park, Jaeyoung Seo, Byoungjun Park, et al.
Proceedings Volume Lithography Asia 2008, 71403G (2008) https://doi.org/10.1117/12.804652
C. M. Tseng, C. Y. Chung, S. C. Chiu, C. W. Yen
Proceedings Volume Lithography Asia 2008, 71403H (2008) https://doi.org/10.1117/12.804464
Thomas Huang, Walter Wang, Chun-Yen Huang, Nick Tseng, Ting-Jhen Guo, Chiang-Lin Shih, Wen-Bin Wu
Proceedings Volume Lithography Asia 2008, 71403J (2008) https://doi.org/10.1117/12.804659
Proceedings Volume Lithography Asia 2008, 71403K (2008) https://doi.org/10.1117/12.804660
Ki-Yeop Park, Ho-young Kang, Gratiela Isai, Khalid Elbattay, Peter van Oorschot, Stuart Young, Seung-Chul Oh, Young-Hong Min, Sung-Goo Hong, et al.
Proceedings Volume Lithography Asia 2008, 71403N (2008) https://doi.org/10.1117/12.804732
Proceedings Volume Lithography Asia 2008, 71403R (2008) https://doi.org/10.1117/12.805238
Proceedings Volume Lithography Asia 2008, 71403U (2008) https://doi.org/10.1117/12.804611
Hyun Soon Lim, Dong Chul Seo, Chang Soo Lee, Sang Wok Park, Sang Jin Kim, Dae Hyeon Shin, Jin Bong Shin, Joo Hyun Park
Proceedings Volume Lithography Asia 2008, 71403X (2008) https://doi.org/10.1117/12.804642
Weicheng Shiu, William Ma, Hong Wen Lee, Jan Shiun Wu, Yi Min Tseng, Kevin Tsai, Chun Te Liao, Aaron Wang, Alan Yau, et al.
Proceedings Volume Lithography Asia 2008, 71403Y (2008) https://doi.org/10.1117/12.804641
Proceedings Volume Lithography Asia 2008, 71403Z (2008) https://doi.org/10.1117/12.804688
R. C. Peng, Tony Wu, K. W. Chang, C. P. Yeh, H. H. Liu, H. J. Lee, John Lin, Allen Chang, Benjamin Szu-Min Lin
Proceedings Volume Lithography Asia 2008, 714041 (2008) https://doi.org/10.1117/12.804616
Nakgeuon Seong, Insung Kim, Dongwoo Kang, Sang-Ho Lee, Jinphil Choi
Proceedings Volume Lithography Asia 2008, 714042 (2008) https://doi.org/10.1117/12.804557
Ray C. Chang, Jui-Chin Yang, Chia-Hung Chen, Chi-Chun Lin, Cathy Wang, Wythe Lin, Chia-Chi Chen
Proceedings Volume Lithography Asia 2008, 714043 (2008) https://doi.org/10.1117/12.806643
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