Precise evaluation of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki; Mototaka Arakawa

doi:10.1117/12.814179

18 March 2009 Precise evaluation of zero-CTE temperature of EUVL-grade TiO₂-SiO₂ ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki, Mototaka Arakawa

Author Affiliations +

Proceedings Volume 7271, Alternative Lithographic Technologies; 72713D (2009) https://doi.org/10.1117/12.814179
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

This paper presents a calibration line between leaky surface acoustic wave (LSAW) velocities (VLSAW) and coefficient-of-thermal-expansion (CTE) characteristics for TiO₂-doped SiO₂ (TiO₂-SiO₂) glass to evaluate the absolute CTE by the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Commercial TiO₂-SiO₂ ultra-low-expansion glass and synthetic silica glass were selected as specimens. We measured V_LSAW by the LFB-UMC system and CTE characteristics by dilatometers, and obtained relationships among VLSAW, CTE at 22°C {CTE(22°C)} and zero-CTE temperature {T(zero-CTE)}. Resolutions of CTE(22°C) and T(zero-CTE) determined by the LSAW velocity measurement were estimated as ±0.72 (ppb/K) and ±0.14°C (±2σ, σ. standard deviation) at 225 MHz. Both manufacturers and users can precisely inspect T(zero-CTE) for all EUVL-grade ultra-low-expansion glass substrates by this indirect evaluation method using the calibration line.

Citation Download Citation

Jun-ichi Kushibiki and Mototaka Arakawa "Precise evaluation of zero-CTE temperature of EUVL-grade TiO₂-SiO₂ ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system", Proc. SPIE 7271, Alternative Lithographic Technologies, 72713D (18 March 2009); https://doi.org/10.1117/12.814179

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE