Deterministic magnetorheological finishing of optical aspheric mirrors

Ci Song; Yifan Dai; Xiaoqiang Peng; Shengyi Li; Feng Shi

doi:10.1117/12.830800

20 May 2009 Deterministic magnetorheological finishing of optical aspheric mirrors

Ci Song, Yifan Dai, Xiaoqiang Peng, Shengyi Li, Feng Shi

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72820I (2009) https://doi.org/10.1117/12.830800
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

A new method magnetorheological finishing (MRF) used for deterministical finishing of optical aspheric mirrors is applied to overcome some disadvantages including low finishing efficiency, long iterative time and unstable convergence in the process of conventional polishing. Based on the introduction of the basic principle of MRF, the key techniques to implement deterministical MRF are also discussed. To demonstrate it, a 200 mm diameter K9 class concave asphere with a vertex radius of 640mm was figured on MRF polish tool developed by ourselves. Through one process about two hours, the surface accuracy peak-to-valley (PV) is improved from initial 0.216λ to final 0.179λ and root-mean-square (RMS) is improved from 0.027λ to 0.017λ (λ = 0.6328um ). High-precision and high-efficiency convergence of optical aspheric surface error shows that MRF is an advanced optical manufacturing method that owns high convergence ratio of surface figure, high precision of optical surfacing, stabile and controllable finishing process. Therefore, utilizing MRF to finish optical aspheric mirrors determinately is credible and stabile; its advantages can be also used for finishing optical elements on varieties of types such as plane mirrors and spherical mirrors.

Citation Download Citation

Ci Song, Yifan Dai, Xiaoqiang Peng, Shengyi Li, and Feng Shi "Deterministic magnetorheological finishing of optical aspheric mirrors", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820I (20 May 2009); https://doi.org/10.1117/12.830800

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