Research on digital gray-tone projection lithography

Jian Wang; Lixin Zhao; Wei Yan; Wnxiang Xu; Song Hu; Xiaoping Tang; Zhaozhi Wang; Shurong Wang; Zhengrong Zhang

doi:10.1117/12.832102

18 May 2009 Research on digital gray-tone projection lithography

Jian Wang, Lixin Zhao, Wei Yan, Wnxiang Xu, Song Hu, Xiaoping Tang, Zhaozhi Wang, Shurong Wang, Zhengrong Zhang

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 728417 (2009) https://doi.org/10.1117/12.832102
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.

Citation Download Citation

Jian Wang, Lixin Zhao, Wei Yan, Wnxiang Xu, Song Hu, Xiaoping Tang, Zhaozhi Wang, Shurong Wang, and Zhengrong Zhang "Research on digital gray-tone projection lithography", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728417 (18 May 2009); https://doi.org/10.1117/12.832102

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