Modeling of wet adhesion of microstructures in shock environment

Zhen-Zhong Wang; Qing-An Huang; Jie-Ying Tang

doi:10.1117/12.835690

24 August 2009 Modeling of wet adhesion of microstructures in shock environment

Zhen-Zhong Wang, Qing-An Huang, Jie-Ying Tang

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73812S (2009) https://doi.org/10.1117/12.835690
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

Adhesion, as one of the most common failure modes compromising reliability of optical MEMS devices, attracted great research interests for enhancing the production yields and device reliability. Experiments show that wet-adhesion with respect to capillary force between interfaces of movable structures is generally the dominant figure among all adhesion natures. Great efforts had been made on examine adhered length of micro-cantilevers to modeling adhesion energy, which are reasonable to predict adhesion in quasi static process such as sacrificial layer release processes. However, the microcosmic mechanism of adhesion has not been well revealed, thereby these models are not sufficiently precise for in-situ adhesion, such as adhesion due to mechanical shock. In this work, a novel model of adhesion energy is derived by review the physical mechanisms carefully and shock caused adhesion is studied applying this model.

Citation Download Citation

Zhen-Zhong Wang, Qing-An Huang, and Jie-Ying Tang "Modeling of wet adhesion of microstructures in shock environment", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73812S (24 August 2009); https://doi.org/10.1117/12.835690

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available