Swing-arm optical CMM for aspherics

Peng Su; Chang Jin Oh; Robert E. Parks; James H. Burge

doi:10.1117/12.828493

21 August 2009 Swing arm optical CMM for aspherics

Peng Su, Chang Jin Oh, Robert E. Parks, James H. Burge

Proceedings Volume 7426, Optical Manufacturing and Testing VIII; 74260J (2009) https://doi.org/10.1117/12.828493
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.

Citation Download Citation

Peng Su, Chang Jin Oh, Robert E. Parks, and James H. Burge "Swing arm optical CMM for aspherics", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 74260J (21 August 2009); https://doi.org/10.1117/12.828493

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