A photonic biosensor system on a CMOS chip

Kevin L. Lear; Rongjin Yan

doi:10.1117/12.842960

22 February 2010 A photonic biosensor system on a CMOS chip

Kevin L. Lear, Rongjin Yan

Proceedings Volume 7606, Silicon Photonics V; 76060D (2010) https://doi.org/10.1117/12.842960
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

Silicon photonic biosensors using SiN_x/SiO₂ waveguides fabricated in a commercial CMOS process are read out with an integrated polysilicon photodetector array buried under the waveguide. Increased surface refractive index, such as that generated by the specific binding of target molecules, locally decreases evanescent coupling to the detector array resulting in reduced photocurrent from elements under the higher index region. The operating principle of this local evanescent array coupled (LEAC) sensor differs from those of other waveguide sensors and has been explored using numerical simulations. Experimental studies have been performed using adsorbed bovine serum albumin (BSA) nanofilms as well as antigen-antibody pairs.

Citation Download Citation

Kevin L. Lear and Rongjin Yan "A photonic biosensor system on a CMOS chip", Proc. SPIE 7606, Silicon Photonics V, 76060D (22 February 2010); https://doi.org/10.1117/12.842960

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