Temperature gradients effect on surface test with high precise interferometer

Er-long Miao; Yong-qiang Gu

doi:10.1117/12.867750

11 October 2010 Temperature gradients effect on surface test with high precise interferometer

Er-long Miao, Yong-qiang Gu

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 765642 (2010) https://doi.org/10.1117/12.867750
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

In high precise surface testing, temperature stability and uniformity are of paramount importance to the high accuracy of test results. Micro-temperature variation and temperature gradients not only cause the change of the air refractive index and lead to the optical path variation in interferometer cavity, but also result in deformation of the tested surface itself, which always brings about errors to the test results. Temperature effects on the interferometer cavity and the tested surface are analyzed from the axial and radial directions in this letter. Temperature model of the interferometer cavity and the tested lens are established and quantitative calculations and diagram of test results versus temperature and lens dimension are provided. It shows that temperature gradients effect increase with the length of the interferometer and the dimension of the tested lens. The interferometer cavity is mainly affected by radial temperature gradients while the tested lens is mainly affected by the axial temperature gradients.

Citation Download Citation

Er-long Miao and Yong-qiang Gu "Temperature gradients effect on surface test with high precise interferometer", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765642 (11 October 2010); https://doi.org/10.1117/12.867750

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